METHOD FOR MANUFACTURING OPTICAL COUPLING ELEMENT, OPTICAL TRANSMISSION SUBSTRATE, OPTICAL COUPLING COMPONENT, COUPLING METHOD, AND OPTICAL TRANSMISSION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an optical coupling structure for interfacing between an optical device arranged on a substrate with an optical waveguide formed on the substrate.

SOLUTION: A method for manufacturing an optical coupling element includes steps for: preparing a wafer 130 formed on an inorganic solid material on a dicing tape 140; cutting the back surface of the wafer 130 to form substantially angled portions using a dicing blade 142 having a point angle; and stripping the dicing tape 140 from the wafer 130 and separating the wafer at the valleys between the substantially angled portions to obtain a three-dimensional polyhedral light-reflecting member 114, which includes a mirror surface corresponding to a surface M of the wafer 130, as an optical coupling element. The obtained optical coupling element 114 is inserted into a trench, which opens in the substrate main surface of an optical transmission substrate 100 while crossing the optical waveguide 106a of the optical transmission substrate 100 substantially perpendicularly, to provide an optical coupling structure with the outside.

COPYRIGHT: (C)2011,JPO&INPIT