| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning-type electrochemistry ion conductance microscope measuring method, scanning type electrochemistry ion conductance microscope, probe of the same, and probe measuring method, capable of attaining shape imaging and electrochemistry imaging by performing scanning, in such a mode that the distance between one probe and a sample is constant, using the probe. SOLUTION: A SECM electrode 26A for measuring a Faraday current is attached onto an end surface formed by sharpening one end of a hollow base material to take it as one end 25b and cutting the end. A probe 21, having a SICM electrode 27 for measuring an ion current corresponding to an outflow amount from an opening 25c<SB>1</SB>in the end surface of electrolyte charged into a hollow portion 25a<SB>1</SB>, is used in the hollow portion 25a<SB>1</SB>of the hollow base material. The probe 21 is scanned relatively along a sample surface, in such a way that the distance between the probe and the sample is constant. Electrochemical imaging of the sample surface is performed with the SECM electrode 26A, while the ion current to be measured with the SICM electrode 27 is used in a distance-control feedback signal, and form imaging of the sample surface is performed with the SICM electrode 27. COPYRIGHT: (C)2011,JPO&INPIT |
