ECR PARTICLE BEAM SOURCE APPARATUS, SYSTEM AND METHOD

摘要

An ion source (10) is disclosed including: a chamber (30) disposed about a longitudinal axis (A) and containing a gas, a magnetic confinement system (36, 38) configured to produce a magnetic field in a confinement region within the chamber, an electron cyclotron resonance driver (44) which produces a time varying electric field which drives the cyclotron motion of electrons located within the confinement region, the driven electrons interacting with the gas to form a confined plasma (57). During operation, the magnetic confinement system confines the plasma in the confinement region such that a portion of atoms in the plasma experience multiple ionizing interactions with the driven electrons to form multiply ionized ions having a selected final ionization state.