| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a variable wavelength filter to which a static actuator is applied, the static actuator generating a high pressure when the same voltage is applied and including an insulating film having superior dielectric strength. <P>SOLUTION: A variable waveform filter includes a movable body 221a having a reflective surface 223 that allows light of a predetermined wavelength to pass and reflects other than light of the predetermined wavelength, a drive electrode 212 facing the movable body across a first gap, a fixed reflective surface 218 facing the reflective surface across a second gap, and an insulating film formed on the surface of the drive electrode 212 on the movable body side. <P>COPYRIGHT: (C)2011,JPO&INPIT |
