发明名称 |
PHYSICAL/BIOCHEMICAL SENSOR EMPLOYING AN ARRAY OF PIEZOELECTRIC MICRO-CANTILEVER RESONATORS OF SEVERAL SIZES, AND A PRODUCTION METHOD THEREFOR |
摘要 |
The present invention discloses a physical/biochemical sensor using a multisized piezoelectric microcantilever resonator array which enables to quantitatively and simultaneously analyze a mass loading effect and a surface stress change effect and a manufacturing method thereof. In the physical/biochemical sensor using the multisized piezoelectric microcantilever resonator array, a plurality of piezoelectric micro-cantilever resonators having different sizes is arrayed so as to quantitatively and discriminately analyze a surface stress change as well as a sensor surface mass change induced by an adsorbed sensing-target material occurring in a sensing process. Thus, the mass loading effect and the surface stress change effect can be quantitatively and simultaneously analyzed. |
申请公布号 |
EP2251681(A1) |
申请公布日期 |
2010.11.17 |
申请号 |
EP20090714045 |
申请日期 |
2009.02.24 |
申请人 |
SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION |
发明人 |
LEE, JAI CHAN;SHIN, SANG HUN |
分类号 |
G01N27/00 |
主分类号 |
G01N27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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