发明名称 PROCESS FOR PRODUCING A QUARTZ GLASS CRUCIBLE
摘要 Provided are a vitreous silica crucible which enables, during pulling, crystallization promotion of the inner surface and retention of the crucible strength, and a method of manufacturing the same. The vitreous silica crucible 10 has, in at least a portion of a straight body section 10, a region between 0.3 mm and 3 mm from the crucible inner surface has an OH group concentration and an OH group concentration gradient which increase as a distance from the inner surface decreases, and decrease as a distance from the inner surface increases. The vitreous silica crucible can be manufactured by a process comprising the step of heating and melting silica powder deposited on an inner surface of a rotating mold to vitrify the silica powder, wherein vapor-containing air is introduced during or right after the melting, or the crucible is reheated, after the melting and cooling, under a vapor-containing environment.
申请公布号 EP2251461(A1) 申请公布日期 2010.11.17
申请号 EP20090718815 申请日期 2009.03.10
申请人 JAPAN SUPER QUARTZ CORPORATION 发明人 HARADA, KAZUHIRO;SATO, TADAHIRO
分类号 C30B15/10;C03B20/00 主分类号 C30B15/10
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