COPOLYMER FOR GAP FILLING MATERIAL COMPOSITION, PREPARATION METHOD THEREOF AND GAP FILLING MATERIAL COMPOSITION FOR ANTIREFLECTIVE COATING LAYER

摘要

PURPOSE: A copolymer for an anti-reflective film gap filling material composition, a manufacturing method thereof, and a filler composition containing thereof are provided to secure the improved filling property without intermixing with a photoresist. CONSTITUTION: A copolymer for an anti-reflective film gap filling material composition is marked with chemical formula 1. In the chemical formula 1, R1 is hydrogen, or an alkyl group with 1~10 carbons. R2, R3, and R4 are the hydrogen, the alkyl group with 1~10 carbons, or an arylalkyl group with 1~20 carbons. R5, R6, and R7 are the hydrogen or a methyl group.