| 摘要 |
PURPOSE: A plasma torch, which improves the disassembly efficiency of the wasted gas by passing the wasted gas through a high temperature of a plasma region, is provided to secure the high pyrolysis efficiency by increasing the contact area and time between plasma and peroxide fluoro carbon gas. CONSTITUTION: A plasma torch comprises an upper electrode(130), a cylindrical housing(140), a bottom electrode(150) and a wasted gas supply line(160). The inside wall of the upper part of the cylindrical housing is separated from the lower flank of the upper electrode as a predetermined distance in order to form an arc part. The bottom electrode is located in the lower part of the housing. The wasted gas supply line supplies gas to the arc chamber at the side of the upper electrode in a tangential direction. |
