发明名称 |
PATTERN FORMATION EMPLOYING SELF-ASSEMBLED MATERIAL |
摘要 |
In one embodiment, Hexagonal tiles encompassing a large are divided into three groups, each containing ⅓ of all hexagonal tiles that are disjoined among one another. Openings for the hexagonal tiles in each group are formed in a template layer, and a set of self-assembling block copolymers is applied and patterned within each opening. This process is repeated three times to encompass all three groups, resulting in a self-aligned pattern extending over a wide area. In another embodiment, the large area is divided into rectangular tiles of two non-overlapping and complementary groups. Each rectangular area has a width less than the range of order of self-assembling block copolymers. Self-assembled self-aligned line and space structures are formed in each group in a sequential manner so that a line and space pattern is formed over a large area extending beyond the range of order. |
申请公布号 |
EP2250123(A2) |
申请公布日期 |
2010.11.17 |
申请号 |
EP20090709244 |
申请日期 |
2009.02.03 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BLACK, Charles, T.;DALTON, Timothy, J.;DORIS, Bruce, B.;RADENS, Carl |
分类号 |
B82B3/00;B81C1/00 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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