| 摘要 |
PURPOSE: An apparatus for cleaning substrate is provided to increase the space efficiency by minimizing the overall size of an apparatus by minimizing the occupying space for transferring of a substrate. CONSTITUTION: A stage part(4) is located on a frame(2). The stage part is formed in order to support the bottom of a substrate(G). A substrate transfer part(6) transfers the substrate from one side to the other side. A cleaning unit(8) cleans the substrate by being arranged on the transferring section of a substrate transferring unit.
|
