发明名称 Method of forming a field effect transistor
摘要 The invention includes methods of forming integrated circuitry, methods of forming memory circuitry, and methods of forming field effect transistors. In one implementation, conductive metal silicide is formed on some areas of a substrate and not on others. In one implementation, conductive metal silicide is formed on a transistor source/drain region and which is spaced from an anisotropically etched sidewall spacer proximate a gate of the transistor.
申请公布号 US7833892(B2) 申请公布日期 2010.11.16
申请号 US20070704488 申请日期 2007.02.09
申请人 MICRON TECHNOLOGY, INC. 发明人 PAREKH KUNAL R.;ZAHURAK JOHN K.
分类号 H01L21/3205;H01L21/336;H01L21/44;H01L21/4763 主分类号 H01L21/3205
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