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发明名称
DISTRIBUTOR EMPLOYED IN A PLASMA CLEAN SYSTEM AND METHOD OF CLEANING USING THE SAME
摘要
申请公布号
KR100994108(B1)
申请公布日期
2010.11.12
申请号
KR20080053883
申请日期
2008.06.09
申请人
发明人
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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