发明名称
摘要 The present invention relates to a process for preparing semiconductor on insulator type structures that include a semiconductor layer of a donor substrate, an insulator layer and a receiver substrate. The process includes bonding of the donor substrate onto the receiver substrate, with at least one of the substrates being coated with an insulator layer, and forming at the bonding interface a so-called trapping interface of electrically active traps suitable for retaining charge carriers. The invention also relates to a semiconductor on insulator type structure that includes such a trapping interface.
申请公布号 JP2010534926(A) 申请公布日期 2010.11.11
申请号 JP20100517382 申请日期 2008.07.21
申请人 发明人
分类号 H01L21/8247;H01L21/02;H01L27/115;H01L27/12;H01L29/788;H01L29/792 主分类号 H01L21/8247
代理机构 代理人
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