| 摘要 |
The present invention provides a piezoelectric thin film element comprising a piezoelectric thin film having a uniform specific shape, a process for producing the same, and an ink jet recording head using the piezoelectric thin film element. A piezoelectric thin film element (1) comprises a substrate (5), a lower electrode (2), a piezoelectric thin film (3) and an upper electrode (4) in this order. A vertical cross-sectional shape and/or a vertical longitudinal sectional shape of the piezoelectric thin film (3) with respect to the substrate (5) is a quadrilateral having upper and lower sides mutually facing and substantially parallel to each other and both lateral sides. A length Lu of the upper side and a length Lb of the lower side preferably satisfy the relationship of Lu > Lb. Anglesθl andθr defined between the lower side and the respective lateral sides are expressed as follows: 90 DEG <θl < 150 DEG and 90 DEG <θr < 150 DEG . The piezoelectric thin film is formed by photo-fabrication using a photosensitive composition capable for forming a ferroelectric thin film. An ink jet recording head using said piezoelectric thin film element. <IMAGE> |
