| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical waveguide which has superior adhesiveness of an optical waveguide film to an inorganic substrate and is manufactured under the same condition by using an organic material regardless of the kind of the inorganic substrate, and to provide a method of manufacturing the optical waveguide. <P>SOLUTION: The optical waveguide includes a lower clad layer, an optical waveguide core and an upper clad layer which are each made of organic materials and successively formed on the inorganic substrate except a silicon substrate, and a buffer layer made of silicon oxide or spin-on glass between the inorganic substrate and the lower clad layer. The optical waveguide is manufactured by successively forming the lower clad layer, the optical waveguide core and the upper clad layer which are each made of organic materials after providing the buffer layer made of the silicon oxide or the spin-on glass on the inorganic substrate except the silicon substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
