发明名称
摘要 An apparatus for providing a light beam for use in a diffraction instrument (1) includes a device (10; 17; 28) for generating a light beam; and means (12, 21; 24) for shaping the light beam generated by the device (10; 17; 28), dimensioned, in use, to determine the beam shape, and including: an aperture (21; 25) and means (13; 24) for rejecting spatial frequency components above a certain range in the light beam. The apparatus further includes a spatial low-pass filter (14; 15; 26; 27) arranged to filter a beam provided by the beam shaping means.
申请公布号 JP2010534830(A) 申请公布日期 2010.11.11
申请号 JP20100517475 申请日期 2008.06.30
申请人 发明人
分类号 G01N15/02;G01N21/47 主分类号 G01N15/02
代理机构 代理人
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