摘要 |
<P>PROBLEM TO BE SOLVED: To provide a TDI image sensor for performing TDI operation, wherein a horizontal OFD is formed without sacrificing the aperture ratio. <P>SOLUTION: A vertical CCD has a VPCCD structure having four or more phases. Horizontal OFDs are formed in transfer gates 7a, 7b, and 7d other than a virtual electrode 8c. The potential barrier of an overflow barrier in the OFDs formed in the transfer electrodes 7b and 7d adjacent to the virtual electrode and the potential barrier of an overflow barrier in the OFDs formed in the transfer electrode 7a not adjacent to the virtual electrode are set to different values. <P>COPYRIGHT: (C)2011,JPO&INPIT |