| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To predict a filter replacement time of a fan filter unit. <P>SOLUTION: An inlet section 1 and a control section 8 incorporating a variable air volume function are disposed at an upper section of a box-shaped chamber 5, a fan unit 4 composed of a fan 2 and a motor 3, and a pressure detecting section 9 for measuring a pressure in the chamber 5 are incorporated in the chamber 5, and the filter 6 is attached to a supply side of the fan unit 4. Pressure fluctuation due to clogging of the filter to a lapse time is calculated by the control section 8 on the basis of clock time data, P-Q data and filter data incorporated in the control section 8, thus the number of days to final pressure loss of the filter is calculated, and the replacement time of the filter 6 can be predicted. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
