| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for inspecting leakage from a micro hole in a bag-like package filled with liquid contents in a nondestructive manner. SOLUTION: The leakage inspection apparatus includes: a light source for generating illumination light with the bag-like package filled with liquid contents as an object to be inspected; a light source side optical system for guiding the illumination light to an inspection object position at which the object to be inspected is placed; a light shielding plate for partially shielding transmitted light transmitted through the inspection object position; and a photographing system which is placed at the rear stage of the light shielding plate to photograph the inspection object position and the surrounding area. COPYRIGHT: (C)2011,JPO&INPIT
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