发明名称 Device and method for terahertz imaging with combining terahertz technology and amplitude-division interference technology
摘要 This invention provides a device and a method for THz imaging to obtain real 3D image of sample and achieve high resolution, by combining THz technology and amplitude-division interference technology.
申请公布号 US2010282968(A1) 申请公布日期 2010.11.11
申请号 US20090457790 申请日期 2009.06.22
申请人 JIN LEI;ZHANG YUANTING;GONG XIAOJING;YANG JUN;ZHANG YANDONG 发明人 JIN LEI;ZHANG YUANTING;GONG XIAOJING;YANG JUN;ZHANG YANDONG
分类号 H01L27/146;G01J5/02 主分类号 H01L27/146
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