| 发明名称 |
Microfabricated miniature grids |
| 摘要 |
A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.
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| 申请公布号 |
US7829864(B2) |
申请公布日期 |
2010.11.09 |
| 申请号 |
US20080082452 |
申请日期 |
2008.04.11 |
| 申请人 |
UNIVERSITY OF MAINE;STILLWATER SCIENTIFIC INSTRUMENTS |
发明人 |
SMITH ROSEMARY;COLLINS SCOTT;FREDERICK BRIAN G.;LEGORE LAWRENCE J. |
| 分类号 |
H01J3/30;H01J9/14;H01J49/06;H01L21/46;H01L23/34 |
主分类号 |
H01J3/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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