发明名称 Thin film scribe process
摘要 A method and apparatus for improving a thin film scribing procedure is presented. Embodiments of the invention include a method and apparatus for determining a scribe setting for removal of an absorber layer of a photovoltaic device that improves contact resistance between a back contact layer and a front contact layer of the device.
申请公布号 US7829356(B2) 申请公布日期 2010.11.09
申请号 US20080212535 申请日期 2008.09.17
申请人 APPLIED MATERIALS, INC. 发明人 MEI FANG;TANNER DAVID;SU TZAY-FA
分类号 G01R31/26 主分类号 G01R31/26
代理机构 代理人
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