DEPOSITION SOURCE

摘要

PURPOSE: A deposition source is provided to easily improve the uniformity of a deposition film by evenly heating the whole-area of a crucible. CONSTITUTION: A deposition source(100) comprises a crucible(110), a first heater(120), and a second heater(150). The first heater surrounds the crucible and applies heat to the crucible. The second heater is separated from the first heater and surrounds the crucible. The second heater has a plurality of sub-heaters(130,140). A plurality of additional heater surrounds the crucible in a separated state.