PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A pressure sensor which increases the pressure sensitivity of a pressure sensor, and a manufacturing method thereof are provided to secure the bond strength with a pedestal by enlarging a junction area. CONSTITUTION: A pressure sensor comprises a sensor chip(10) and a pedestal(11). The sensor chip comprises a first semiconductor layer(1) and a second semiconductor layer(3). The semiconductor layer has an opening. The second semiconductor layer is formed on the semiconductor layer. The second semiconductor layer has a concave part in which a diaphragm is. A pedestal comprises a pressure guiding hole(17).