发明名称 |
ION DETECTION DEVICE FOR MASS ANALYSIS, ION DETECTION METHOD, AND PRODUCTION METHOD FOR ION DETECTION DEVICE |
摘要 |
<p>Provided are an ion detection device, an ion detection method, and a production method for the ion detection device, wherein the effect of an electric field to bring ions to be detected toward a first-stage electrode of a secondary electron multiplier is improved and the effect of stray-light reduction is also improved. The ion detection device includes the secondary electron multiplier which includes a plurality of electrodes, and a bring-in electrode which brings ions toward the first-stage electrode of the secondary electron multiplier. When ions are brought into the ion detection device, at least either the area of the bring-in electrode or the difference in potential between the bring-in electrode and an electrode that is disposed around the bring-in electrode and the secondary electron multiplier does not have is set so that the intensity of internal stray-light that is produced inside the ion detection device and falls on the first-stage electrode is below the intensity of external stray-light that is produced outside the ion detection device and falls on the first-stage electrode.</p> |
申请公布号 |
WO2010125669(A1) |
申请公布日期 |
2010.11.04 |
申请号 |
WO2009JP58462 |
申请日期 |
2009.04.30 |
申请人 |
CANON ANELVA CORPORATION;NAKAMURA MEGUMI;SHIOKAWA YOSHIRO;PENG QIANG |
发明人 |
NAKAMURA MEGUMI;SHIOKAWA YOSHIRO;PENG QIANG |
分类号 |
H01J49/06;G01T1/28;H01J43/06 |
主分类号 |
H01J49/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|