| 摘要 |
<p>Provided is a vapor measurement device that has a simple structure, has no danger of sensor degradation due to condensation or the like, and is capable of qualitative measurements and measurements of a quality that allow reproduction of process conditions. Said vapor measurement device has a moisture-sensitive part formed from a porous material, and a first sensor that measures the temperature near the surface of the moisture-sensitive part. The vapor measurement device is characterized by the provision of a supply channel that supplies water to the interior of the moisture-sensitive part, and an outlet channel through which water leaves the interior of the moisture-sensitive part.</p> |
