COOLING DEVICE, COOLING ARRANGEMENT, AND LITHOGRAPHY APPARATUS INCLUDING COOLING ARRANGEMENT

摘要

PROBLEM TO BE SOLVED: To enable efficient cooling and stable positioning of an object that is a detector, such as a photodetector, disposed in a vacuum space.

SOLUTION: A described cooling arrangement includes a heat sink having a first heat contact surface, an object having a second heat contact surface, and an elastic wall. The first heat contact surface and the second heat contact surface are set facing each other to form a gap. The elastic wall is part of an enclosure enclosing a space at least containing the gap. The cooling arrangement includes equipment that maintains a pressure difference between the space and an environment given by the cooling arrangement. A lithography apparatus includes this cooling arrangement.

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