| 摘要 |
PROBLEM TO BE SOLVED: To provide a dimension inspection apparatus accurately disposing a target at an intended measurement point, automatically designating a target position by software, automatically inspecting a dimension of a component the dimension of which is inspected, and preventing an attachment error of the target, an error due to an irregularity by a person who measures the dimension, and an alteration of a data, and also to provide a component to be imaged, used for the apparatus. SOLUTION: A component to be imaged having the target at a previously imaged (viewed) position is fixed in a plurality of positionable regions at least the two-dimensional coordinate positions of which are known in the component the dimension of which is inspected so as to capture a plurality of images. A data processor is used, and has the software for calculating the coordinate of the positionable region from an image data, comparing it with the known coordinate position, and determining the quality of the component the dimension of which is inspected. The imaging component fixed in the positionable region of the component the dimension of which is inspected is a member in which a target center corresponds to the known coordinate position by fixing. COPYRIGHT: (C)2011,JPO&INPIT
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