| 摘要 |
PROBLEM TO BE SOLVED: To provide an error compensation method and components measuring method using this, which decrease a cost of a measuring device and secure a measurement precision. SOLUTION: The error compensation method includes steps of: providing the measuring device equipped with a probe and a guide; measuring and compensating a straightness error of the guide; carrying out a fitting of mounting tilt angle of the probe, a step which calculates a shape error of the probe; and forming a systematic error compensation program. The components measuring method includes steps of forming the systematic error compensation program through the error compensation method; providing the components which have a curved surface or a curve; measuring the curved surface or the curve of the components by using the above measuring device; measuring and compensating the straightness error of the guide; compensating the error of the fitting tilt angle of the probe; compensating the shape error of the probe; and forming the measuring error by the program. COPYRIGHT: (C)2011,JPO&INPIT |
