| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein in a passive magnetic bearing using a permanent magnet, it is difficult to inexpensively and stably rotate a large-sized support, and on the other hand, when a cryotrap is added to increase the exhaust speed of steam and also a high-temperature superconductive magnetic bearing is utilized at the same time, the cost of the high-temperature superconductor and refrigerating capability of a refrigerator become excessive, so that the whole system is expensive after all. SOLUTION: A medium high vacuum booster pump 1 supported by the cryotrap and the high-temperature superconductive magnetic bearing is disposed in the preceding stage of a small-sized ball bearing type turbo-molecular pump 2. The medium high vacuum booster pump is coupled to a small-sized ball bearing type turbo-molecular pump 2 at the subsequent stage by a non-contact electromagnetic induction coupler 1-6, whereby the medium high vacuum booster pump is rotated by turning torque of the small-sized ball bearing type turbo-molecular pump to achieve the exhaust speed of the turbo-molecular pump corresponding to the medium type, besides achieve a vacuum pump system in which the exhaust speed of steam corresponds to that of the cryopump by the cryotrap. COPYRIGHT: (C)2011,JPO&INPIT
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