| 摘要 |
PROBLEM TO BE SOLVED: To raise overall use efficiency of an organic metallic compound in a feeder which supplies the organometallic compound which is solid at normal temperature by making it accompany carrier gas. SOLUTION: The feeder has: two containers 1a, 1b; and a communicating tube 5 which makes the insides of the containers 1a, 1b communicate with each other at their lower ends. The container 1a is provided with a gas introduction pipe 2, and the container 1b is provided with a gas delivery pipe 3. A crushed matter 10 containing objects with particle diameters of less than 0.84 mm obtained by crushing the organometallic compound after making a spherical carrier carry the organometallic compound is filled inside the containers 1a, 1b. COPYRIGHT: (C)2011,JPO&INPIT
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