| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device which accurately measures a shape of a work, concerning the measuring device wherein a table is operated relative to a fixed sensor. SOLUTION: This device includes: a sensor 2 having a light source 21 for irradiating slit light by a laser, and an imaging part 22 for imaging a light cutting line generated by the slit light; the table 31 arranged on a measurement start position set beforehand, holding a work W on a light receiving surface 31a receiving the slit light, and performing a prescribed operation after start of measurement; a measuring part 4 for converting image data from the imaging part 22 into position data, and measuring the shape of the work; and a deviation detection part 52 for providing position information which allows detection of deviation of the light receiving surface 31a to the measuring part 4. The measuring part 4 detects deviation based on the position information, and when detecting the deviation, corrects the position data corresponding to the deviation, and measures the shape of the work. COPYRIGHT: (C)2011,JPO&INPIT
|
