DICING DEVICE, DICING DEVICE HAVING EXHAUST DEVICE OF WATER AND AIR, AND CONTROL METHOD OF ENVIRONMENT THEREOF

摘要

PURPOSE: A dicing device, a dicing device thereof, and an environmental control method thereof are provided to prevent water and mist from being sprayed to adjacent area by directly injecting the water and the mist into a draining device and an exhaust device. CONSTITUTION: A work table(24) mounts a work piece. A blade(25) cuts the work. A spindle(30) rotatably attaches the blade. A spindle transport device(28) supports the spindle. A drainage exhaust device(38) is arranged in a part where the spindle transport device and a work table transport device(26) are orthogonal to each other.