| 摘要 |
<p>PURPOSE: A method for forming a pellicle membrane is provided to eliminate linear defects by pre-drying, eliminating, and drying the pellicle membrane. CONSTITUTION: An organic solution is applied to form a pellicle film on a substrate. A applied organic solution film is primarily dried. The dried film is eliminated from the substrate. The eliminated dried film is re-dried to form a pellicle film. In the primarily drying process, a part of the solution contained in the applied film is eliminated.</p> |
