APPARATUS AND METHOD FOR INSPECTING HOMOGENEITY OF SOLAR CELL QUANTUM EFFICIENCY USING IMAGING DEVICE

摘要

The present invention relates to an apparatus for inspecting the homogeneity of solar cell quantum efficiency using an imaging device, comprising: a light emitting device (100) for irradiating a predetermined amount of light; imaging device (200) for changing a light path of the rays emitted from the light emitting device (100) according to the individual control of a plurality of pixels; an imaging device controller (300) for individually controlling the status of the plurality of pixels of the imaging device (200); a solar cell plate (400) on which rays passing through or reflected from the imaging device (200) is irradiated; and a calculation controller (900) for calculating the quantum efficiency of the solar cell plate (400) on the basis of a photocurrent signal generated from the solar cell plate (400). The invention can prevent vibration and noise by eliminating mechanical movements during the inspection for homogeneity of the solar cell plate according to quantum efficiency by irradiating the ray on the solar cell plate, and shorten inspection time through the projection of predetermined inspection patterns, thereby having a wide range of application for a production line.