SLURRY COMPOSITION AND METHOD OF FABRICATING DAMASCENE STRUCTURE USING THE SAME

摘要

A slurry composition has an amount of 100 % and includes abrasives, an acid- base pH adjustor, an oxidant and water. A content of the abrasives is 10 wt% to 40 wt%, and a polydisperse index of the abrasives sizes is greater than 1.8. A content of the acid-base pH adjustor is 0.01 wt% to 10 wt%. A content of the oxidant is 0.01 wt% to 10 wt%. A remaining portion of the slurry composition is water. No suitable figure.