发明名称 Nitride semiconductor optical element and method of manufacturing the same
摘要 Provided is a semiconductor laser element having a first protective film provided at least over the light emitting end face of an active layer (3-period multiple quantum well (MQW) active layer); and a second protective film provided over the first protective film, wherein, the first protective film is provided between a semiconductor which composes the light emitting end face and the second protective film, and a portion of the first protective film, brought into direct contact with the semiconductor, is mainly composed of a rutile-structured TiO2 film.
申请公布号 US2010272142(A1) 申请公布日期 2010.10.28
申请号 US20100662185 申请日期 2010.04.05
申请人 NEC ELECTRONICS CORPORATION 发明人 FUKUDA KAZUHISA
分类号 H01S5/02;H01L33/00 主分类号 H01S5/02
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