| 摘要 |
This invention relates to near field assemblies with improved optical coupling efficiency suitable for near field photolithography and heat assisted magnetic recording with fluid bearing structures. Masters for photolithography are fabricated using a fluid bearing suspended at a near field distance using hydrostatic bearings. Near field features fabricated on a fluidized slider emit a radiated laser to develop a photo-resist layer deposited on the master replicator. A plurality of near field assemblies is etched on a wafer. Each of the near field assemblies includes a planar solid immersion mirror, at least one grating, and a near field transducer. The features created during the etching step are used to guide at least one milling tool to machine at least one surface on one or more of the planar solid immersion mirror, the at least one grating, and the near field transducer. The features created during the machining step are used to guide at least one polishing tool to polish at least one surface on one or more of the planar solid immersion mirror, the at least one grating, and the near field transducer. The wafer is cut to create a plurality of discrete near field assemblies.
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