| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method capable of efficiently demonstrating a cleaning effect by the interaction of the ultrasonic waves and the bubbles by transmitting ultrasonic waves in the state that a sufficient amount of bubbles are present near dirt. SOLUTION: In the ultrasonic cleaning method for cleaning an object 10 to be cleaned by the interaction of the ultrasonic waves 14 and the bubbles 13 by driving an ultrasonic vibrator 15 to transmit the ultrasonic waves 14 to cleaning liquid 12 inside a cleaning tank 11 and generating the bubbles 13 in the cleaning liquid 12. By intermittently driving the ultrasonic vibrator 15, the density of the bubbles 13 continuously generated and made to stay in the cleaning liquid 12 is increased during the drive stop of the ultrasonic vibrator 15 and the object 10 to be cleaned is cleaned. The intermittent drive of the ultrasonic vibrator 15 is controlled by setting the cycle time of repeating the drive and drive stop of the ultrasonic vibrator 15, for instance. COPYRIGHT: (C)2011,JPO&INPIT
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