PULSED LASER DEPOSITION WITH EXCHANGEABLE SHADOW MASKS

摘要

The invention relates to a device for pulsed laser deposition, which device comprises: - a substrate mount with a substrate mounted thereon; - a target mount with a target material mounted thereon and opposite of the substrate mount; - a laser device for directing a laser beam on the target material; and - a shadow mask arranged over the substrate; wherein the shadow mask is arranged in a movable disc, which movable disc is movable in axial direction to and from the substrate mount. The invention also relates to a method for operating such a device.