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发明名称
Device and method to transport substrates evenly
摘要
申请公布号
EP2060515(B1)
申请公布日期
2010.10.27
申请号
EP20080019803
申请日期
2008.11.13
申请人
RENA SONDERMASCHINEN GMBH
发明人
HUEBEL,EGON
分类号
B65G47/28
主分类号
B65G47/28
代理机构
代理人
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地址
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