| 摘要 |
The invention relates to a positioning system for positioning and/or measuring a movable object, wherein the movable object (10) has an object position that is defined with respect to a at least two axes (X, Y) extending in at least two different directions. The movable object (10) has a first surface (SX) and a second surface (SY) having mutually different orientations. The first surface (SX) makes a first angle (±) with the first direction and the second surface (SY) makes a second angle (²) with the second direction. The positioning system comprises: i) a first bearing (BX) for establishing a first surface position of the first surface (SX) with respect to the first axis (X) and for allowing a movement of the movable object (10) in a first plane parallel to the first surface (SX) in at least the second direction; ii) a second bearing (BY) for establishing a second surface position of the second surface (SY) with respect to the second axis Y and for allowing a movement of the movable object (10) in a second plane parallel to the second surface (SY) in at least the second direction. The system further comprises respective actuators for establishing the respective positions. Such system may be further extended to three dimensions. The advantage of the positioning system is that during movement of the movable object less masses are moved. The positioning system is widely applicable. The invention further relates to a machine or a tool comprising such positioning system. |
