| 摘要 |
<p>PURPOSE: A lithographic apparatus, a positioning system, and a positioning method thereof are provided to stop a control when the control has problems and to return a target to an original position moving a frame. CONSTITUTION: A lithographic apparatus, positioning system, and positioning method includes a measuring system, an actuator, and a controller(CS). The measuring system measures the position of a movable object(MO). The actuator applies force to the movable object. The controller applies a driving signal to the actuator based on the output of the measuring system.</p> |
