发明名称 METHOD OF PRODUCING RETAINER RING ABRASIVE AND RETAINER RING ABRASIVE MADE THEREBY
摘要 PURPOSE: A manufacturing method of retainer ring for polishing and a retainer ring manufactured by the same are provided to improve the efficiency of work by emitting a separate groove manufacturing task. CONSTITUTION: A manufacturing method of retainer ring is as follows. The upper side of a base material(2) smoothly processes. An abrasive(4) is processed corresponding to the upside shape of the base material in order to manufacturing a singular number of abrasive units(45). An abrasive monomer is adhered to the upper side of the base material at a regular interval.
申请公布号 KR20100114327(A) 申请公布日期 2010.10.25
申请号 KR20090032809 申请日期 2009.04.15
申请人 IS TECHNO. CO., LTD. 发明人 HWANG, JUNG HO
分类号 B24B37/32;B24D7/06;H01L21/304 主分类号 B24B37/32
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