发明名称 LIGHT SOURCE DEVICE AND ADJUSTING METHOD OF THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a light source device for adjusting overlapping of optical pulses in a sum frequency generation element in a simple and inexpensive composition. <P>SOLUTION: The light source device 1 includes: a laser beam generation part 10 for generating pulse light; an optical amplification part 20 provided with a plurality of optical amplifiers 21-23 for juxtaposing and branching generated pulse light into a plurality of the pulse light beams, and amplifying and emitting each pulse light beams respectively; and a wavelength conversion part 30 for generating harmonic waves by sum frequency generation by overlapping the pulse light beams emitted from the optical amplifiers on the same axis, and making them incident on a wavelength conversion optical element. The outlet parts of the optical amplifiers 22, 23 comprise: optical elements 50 for collimating the pulse light beams emitted to the wavelength conversion parts 30 into parallel light beams; and an adjusting mechanism 60 for setting to adjust the positions of optical axis directions of the optical elements 50 for the wavelength conversion parts 30. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2010237234(A) 申请公布日期 2010.10.21
申请号 JP20090081685 申请日期 2009.03.30
申请人 NIKON CORP 发明人 KAWAI HITOSHI
分类号 G02F1/37;H01S3/10 主分类号 G02F1/37
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