| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a temperature and humidity control device the which discharges a gas the temperature and humidity of which are controlled. <P>SOLUTION: The temperature and humidity control device is equipped with: a heating circuit side having a heater 14; a cooling circuit side having a cooler 16 to which a heating medium adiabatically expanded by an automatic expansion valve 28 and cooled is supplied; and a heat pump means. The temperature and relative humidity control device further is equipped with: a temperature adjustment control part 22 for controlling two-way valves 20a, 20b for distributing a heating medium compressed by a compressor 18 and heated into the heating circuit side and the cooling circuit side and adjusting air as a target of temperature and humidity control to target temperature; and a humidity control part 27 for controlling supply amount of dry air from a dry gas nozzle 64 provided to supply dry air with lower humidity than target humidity to inside of a gas flow passage 10 so that air passed through the heater 14 and the cooler 16 arranged in the gas flow passage 10 is adjusted to the target humidity. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
