| 摘要 |
PROBLEM TO BE SOLVED: To fully reduce the planar space of a substrate lifting and lowering apparatus 7 and promote the effective use of space inside a plant. SOLUTION: A first attitude-switching member 29, equipped with a first pose switch holding assembly 37, is set up on one side of first substrate processing apparatus 3 is arranged so that it can swing about a horizontal axis; a second pose switching member 49, equipped with a second pose switch holding assembly 41, is set up on one side of second substrate processing apparatus 5 so that it can swing about a horizontal axis; a no-end member 63 extended vertically is arranged in a holding frame 53 installed upright at one side of the first pose-switching member 29 so as to allow cyclical run; and multiple lift-holding assemblies 69 are fitted at intervals on the no-end member 63, in a circumferential direction. COPYRIGHT: (C)2011,JPO&INPIT |
