发明名称 |
METHOD AND APPARATUS FOR RESIDUE DETECTION IN THE EDGE DELETED AREA OF A SUBSTRATE |
摘要 |
Apparatus and methods for detecting residue on a glass substrate and method of use are disclosed. The apparatus comprises a substrate support, a sensor, a controller and a peripheral device in communication with the controller. The apparatus measures the height or thickness of a main surface and an edge delete surface of a substrate to determine if film residue is present on the edge delete surface. |
申请公布号 |
WO2010121112(A2) |
申请公布日期 |
2010.10.21 |
申请号 |
WO2010US31364 |
申请日期 |
2010.04.16 |
申请人 |
APPLIED MATERIALS, INC.;TSAI, KENNETH CHIEN-QUEN;SCHLEZINGER, ASAF |
发明人 |
TSAI, KENNETH CHIEN-QUEN;SCHLEZINGER, ASAF |
分类号 |
G01N21/88;G01B11/06;G01B11/30;G01N21/47;H01L21/67 |
主分类号 |
G01N21/88 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|