发明名称 |
METHOD FOR MANUFACTURING LARGE-AREA VACUUM PLASMA TREATED SUBSTRATES AND VACUUM PLASMA TREATMENT APPARATUS |
摘要 |
A large surface substrate (5, 5a) is Rf vacuum plasma treated with the help of an electrode arrangement (9) consisting of an even number of electrode strips (9a, 9b). At least one of the strips is Rf supplied at least two distinct loci (P1, P2) along the central axis (A) of the addressed strip (9a).
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申请公布号 |
US2010264118(A1) |
申请公布日期 |
2010.10.21 |
申请号 |
US20080808192 |
申请日期 |
2008.12.19 |
申请人 |
OERLIKON SOLAR IP AG, TRUBBACH |
发明人 |
JOST STEPHAN;BELINGER ANDREAS |
分类号 |
C23F1/08;C23C16/00;C23C16/505;C23F1/00 |
主分类号 |
C23F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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