发明名称 Method of Fabricating Thin Film Interface for Internal Light Reflection and Impurities Isolation
摘要 A high-quality epitaxial silicon thin layer is formed on an upgraded metallurgical grade silicon (UMG-Si) substrate. A thin film interface is fabricated between the UMG-Si substrate and the epitaxial silicon thin layer. The interface is capable of internal light reflection and impurities isolation. With the interface, photoelectrical conversion efficiency is improved. Thus, the present invention is fit to be applied for making solar cell having epitaxial silicon thin layer.
申请公布号 US2010267223(A1) 申请公布日期 2010.10.21
申请号 US20090618862 申请日期 2009.11.16
申请人 ATOMIC ENERGY COUNCIL-INSTITUTE OF NUCLEAR ENERGYRESEARCH 发明人 YANG TSUN-NENG
分类号 H01L21/20 主分类号 H01L21/20
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